RIKEN Review No.50 ( January, 2003 )

Laser Precision Microfabrication (LPM2002)


Category Title Author pp.x-x PDF
Spot Laser precision microfabrication K.Sugioka p.1
R & Tech. Review Development and application of new high-power laser beam sources R.Poprawe and W.Schulz pp.3-10
R & Tech. Review Laser applications overview: The state of the art and the future trend in the United States C.Phipps pp.11-19
R & Tech. Review Challenge to advanced laser materials processing in Japanese industry I.Miyamoto pp.20-28
R & Tech. Review Diagnostics of particle dynamics during optically functional thin-film deposition by laser ablation T.Okada, Y.Nakata, and M.Maeda pp.29-33
R & Tech. Review Atom lithography with laser-cooled silicon atoms H.Kumagai, Y.Asakawa, T.Iwane, K.Midorikawa, and M.Obara pp.34-37
R & Tech. Review Optical waveguide filter fabricated by excimer laser irradiation J.Nishii, K.Kintaka, Y.Kawamoto, and M.Takahashi pp.38-41
R & Tech. Review Enhance refractive index modification of fused silica by multiwavelength excitation process using F2 and KrF excimer lasers K.Obata, K.Sugioka, K.Toyoda, and K.Midorikawa pp.42-46
R & Tech. Review Laser-induced chemical micro-treatment and synthesis of materials S.Metev, A.Stephen, J.Schwarz, and C.Wochnowski pp.47-52
R & Tech. Review Laser tuning silicon microdevices for analogue microelectronics M.Meunier, M.Cadotte, and M.Ducharme pp.53-56
R & Tech. Review Laser direct-write of miniature sensor and microbattery systems A.Piqué, C.B.Arnold, R.C.Wartena, B.Pratap, B.Shashishekar, K.E.Swider-Lyons, D.W.Weir, and R.A.Kant pp.57-62
R & Tech. Review Extreme ultraviolet light sources--State of the art, future developments, and potential applications U.Stamm pp.63-70
R & Tech. Review Ultrafast laser material processing using dynamic temporal pulse shaping R.Stoian, M.Boyle, A.Thoss, A.Rosenfeld, G.Korn, and I.V.Hertel pp.71-76
R & Tech. Review Femtosecond technology for precision manufacturing: Fundamental and technical aspects F.Dausinger pp.77-82
R & Tech. Review Microstructuring of SiC by laser ablation with pulse duration from ns to fs range E.W.Kreutz, R.Weichenhain, R.Wagner, and A.Horn pp.83-86
R & Tech. Review Precise deep drilling of metals by femtosecond laser pulses A.Ostendorf, G.Kamlage, and B.N.Chichkov pp.87-89
R & Tech. Review Toward nano- and microprocessing in glass with femtosecond laser pulses K.Itoh and W.Watanabe pp.90-94
R & Tech. Review Time-resolved dynamics of plasma formation and refractive index modification in silica glasses excited by a femtosecond laser S.-H.Cho, H.Kumagai, and K.Midorikawa pp.95-100
R & Tech. Review 3D microstructuring inside Foturan glass by femtosecond laser Y.Cheng, K.Sugioka, M.Masuda, K.Toyoda, M.Kawachi, K.Shihoyama, and K.Midorikawa pp.101-106
R & Tech. Review Femtosecond laser micromachining: Current status and applications N.H.Rizvi pp.107-112
R & Tech. Review Medical applications for ultrafast laser pulses H.Lubatschowski, A.Heisterkamp, F.Will, A.I.Singh, J.Serbin, A.Ostendorf, O.Kermani, R.Heermann, H.Welling, and W.Ertmer pp.113-118

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