RIKEN Review No.43 ( January, 2002 )

Laser Precision Microfabrication (LPM 2001)


Category Title Author pp.x-x PDF
Spot Laser Precision Microfabrication K.Sugioka p.1
R & Tech. Review An overview of laser microprocessing in data storage industry T.-C.Chong and Y.-F.Lu pp.3-7
R & Tech. Review Femtosecond pulses for medicine and production technology: A new German national project F.Dausinger pp.8-13
R & Tech. Review History and future prospects of excimer laser technology D.Basting, K.Pippert, and U.Stamm pp.14-22
R & Tech. Review Novel ultrashort pulse fiber lasers for micromachining applications H.Endert, A.Galvanauskas, G.Sucha, R.Patel, and M.Stock pp.23-27
R & Tech. Review Basic physical problems related to dry laser cleaning B.S.Luk'yanchuk, Y.W.Zheng, and Y.F.Lu pp.28-34
R & Tech. Review Laser-induced expansion and ablation mechanisms of organic materials Y.Hosokawa, T.Mito, T.Tada, T.Asahi, and H.Masuhara pp.35-40
R & Tech. Review Carbon nitride materials synthesized by Ion-assisted pulsed laser deposition Z.-M.Ren, Y.-F.Lu, and Z.-F.He pp.41-44
R & Tech. Review GaN ablation etching using short wavelength pulsed laser T.Akane, K.Sugioka, K.Midorikawa, K.Obata, N.Aoki, and K.Toyoda pp.45-48
R & Tech. Review Laser shaping of diamond for IR diffractive optical elements V.V.Kononenko, V.I.Konov, S.M.Pimenov, A.M.Prokhorov, A.P.Bolshakov, S.A.Uglov, V.S.Pavelyev, V.A.Soifer, B.Lüdge, and M.Duparré pp.49-55
R & Tech. Review Laser-assisted chemical micromachining of metals and alloys A.Stephen, T.Lilienkamp, S.Metev, and G.Sepold pp.56-62
R & Tech. Review Laser processes for MEMS manufacture A.S.Holmes pp.63-69
R & Tech. Review High-accuracy laser mask repair technology using ps UV solid state laser Y.Morishige pp.70-75
R & Tech. Review Ultra line-narrowed F2 laser for microlithography H.Komori, T.Ariga, H.Watanabe, T.Kumazaki, N.Kitatochi, K.Sasano, Y.Ueno, T.Nishisaka, R.Nohdomi, K.Hotta, H.Mizoguchi, and K.Nakao pp.76-79
R & Tech. Review High-speed microvia formation with UV solid state lasers C.Dunsky, H.Matsumoto, and G.Simenson pp.80-88

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