RIKEN Review No.32 ( January, 2001 )

Laser Precision Microfabrication (LPM2000)


Category Title Author pp.x-x PDF
Spot Introduction K.Midorikawa and K.Sugioka p.1
Spot Opening address I.Miyamoto p.2
R & Tech. Review Laser precision microfabrication in the Japanese industry I.Miyamoto, T.Ooie, and S.Takeno pp.3-10
R & Tech. Review Laser microshaping: Fundamentals, practical applications, and future prospects V.P.Veiko pp.11-18
R & Tech. Review Molecular dynamics simulation of ablation process with ultrashort-pulse laser E.Ohmura, I.Fukumoto, and I.Miyamoto pp.19-22
R & Tech. Review On the physics of material processing with femtosecond lasers I.V.Hertel, R.Stoian, D.Ashkenasi, A.Rosenfeld, and E.E.B.Campbell pp.23-30
R & Tech. Review Advanced lasers for photonic device microfabrication P.R.Herman, K.P.Chen, P.Corkum, A.Naumov, S.Ng, and J.Zhang pp.31-35
R & Tech. Review Novel technology for laser precision microfabrication of hard materials K.Sugioka and K.Midorikawa pp.36-42
R & Tech. Review Etching of transparent materials by laser ablation of an organic solution J.Wang, H.Niino, and A.Yabe pp.43-46
R & Tech. Review Laser-based technologies for photonic device integration J.J.Dubowski pp.47-49
R & Tech. Review Excimer laser microfabrication and micromachining M.Gower pp.50-56
R & Tech. Review Laser microprocessing for nanosatellite microthruster applications H.Helvajian, P.D.Fuqua, W.W.Hansen, and S.Janson pp.57-63
R & Tech. Review Laser removal of particles from solid surfaces Y.F.Lu, W.D.Song, Y.Zhang, M.H.Hong, and T.C.Chong pp.64-70
R & Tech. Review Laser processes for precise microfabrication of magnetic disk-drive components A.C.Tam pp.71-76

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